Electrostatic Chuck (ESC) Coulomb Type - Coulomb Type - Fine Ceramic New Material Co.,Ltd

Product Introduction

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MAIN APPLICATIONS

Structure

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CHARACTERISTIC

Fix the product to the electrostatic chuck through built-in adsorption electrodes to meet processing needs.
To control product temperature by using a built-in heater and combining multiple temperature zones for temperature control to ensure the process consistency.
Using high-purity raw materials to achieve low particle pollution and strong resistance to plasma erosion.
High precision shape processing, excellent mechanical strength.

Material Parameters

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ltem		Unit	Alumina (Al₂O₃)
Product Model		/	AO960	AO995	AO920
Color		/	White	lvory	Black
Bulk Density		g/cm	3.7	3.9	3.6
Water Absorption		%	0	0	0
Vickers Hardness HV1 (Load=9.807N)		(GPa)	13.7	16.0	12.7
Flexural Strength (3PB) R.T.		MPa	350	360	320
Young's Modulus of Elasticity		GPa	320	370	320
Poisson's Ratio		/	0.23	0.23	0.23
Fracture Toughness (SEPB)		MPam ^½	/	4	/
Coefficient of Linear Thermal Expansion	40℃~400℃	x10^-6/℃	7.2	7.2	7.3
Coefficient of Linear Thermal Expansion	40℃~800℃	x10^-6/℃	7.9	8.0	8.1
Thermal Conductivity 20℃		W/(m.K)	24	32	12
Specific Heat Capacity		J/(g.k)	0.78	0.78	0.75
Heat Shock Temperature		℃	200	250	/
Dielectric Strength		KV/mm	15	15	12
Volume Resistivity	20℃	Ω.cm	>10¹⁴	>10¹⁴	>10¹¹
	300℃		>10¹⁰	>10¹³	>10⁷
	500℃		>10⁸	>10¹⁰	>10⁵
Dielectric Constant(1MHz)		/	9.4	9.9	9.8
Dielectric Loss Angle(1MHz)		x10^-4	4	1	20
Nitric Acid(60%) 90℃, 24H		WT Loss mg/cm²	/	0.07	/
Sulphuric Acid(95%) 95°C, 24H			/	0.23	/
Caustic Soda(30%) 80°C,24H			/	0.05	/
Size: 200,300 mm (Customizable)

ltem		Unit	Aluminum Nitride (AlN)
Product Model		/	AN160	AN80
Color		/	Gray	Ivory
Bulk Density		g/cm	3.3	3.2
Water Absorption		%	0	0
Vickers Hardness HV1 (Load=9.807N)		(GPa)	10.4	11.2
Flexural Strength (3PB) R.T.		MPa	310	220
Young's Modulus of Elasticity		GPa	320	310
Poisson's Ratio		/	0.24	0.24
Coefficient of Linear Thermal Expansion	40℃~400℃	x10^-6/℃	4.6	4.6
Coefficient of Linear Thermal Expansion	40℃~800℃	x10^-6/℃	5.3	5.3
Thermal Conductivity 20℃		W/(m.K)	150	70
Specific Heat Capacity		J/(g.k)	0.71	0.72
Dielectric Strength		KV/mm	14	16
Volume Resistivity	20℃	Ω.cm	>10¹⁴	>10¹⁴
	300℃		>10¹⁰	>10¹⁰
	500℃		>10⁸	>10⁹
Dielectric Constant(1MHz)		/	8.6	8.5
Dielectric Loss Angle(1MHz)		x10^-4	3	2

Electrical Parameters

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