Ceramic vacuum chucks are mainly composed of microporous ceramics and frames, and can also be called porous ceramic chucks.
Four main advantages:
Product Introduction
Main Applictions
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Dicing saw, Thinning machine
Laser drilling, Precision printing
Air floating platform, Wafer inspection
Structure
Performance Parameters
Size
4 inches
6 inches
8 inches
12 inches
Flatness
3 μm
5 μm
5 μm or 10 μm
Color of Porous Ceramics
White, black, brow
Material of Porous Ceramics
Aluminum oxide and silicon carbide
Pore Size of Porous Ceramics
5-200 μm
Porosity of Porous Ceramics
30%-50%
Base Material
Stainless steel, aluminum alloy, ceramic
Antistatic Function
Optional
Flexural Strength
55-70 MPa
Volume Resistivity
4.5*107-9 Ω.cm