Ceramic vacuum chucks are mainly composed of microporous ceramics and frames, and can also be called porous ceramic chucks.
Four main advantages:
- Good flatness and parallelism
- Dense and uniform structure, high strength
- Good air permeability: micropore size: 5-200μm, porosity: 30%-50%
- Uniform adsorbability: uniformity of airpermeability: ± 3Kpa pressure tolerance within 10*10mm area (adjustable)
