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Electrostatic Chuck
Electrostatic Chuck
Electrostatic Chuck
Home > PRODUCTS > Electrostatic Chuck

Electrostatic Chuck Electrostatic Chuck

Electrostatic Chuck
Coulomb Type
J-R Type
Ceramic Vacuum Chuck
AlN Ceramic Heater
Electrostatic Chuck (ESC) Coulomb Type
Electrostatic Chuck (ESC) Coulomb Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.
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Electrostatic Chuck (ESC) Coulomb Type
Electrostatic Chuck (ESC) Coulomb Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.
VIEW MORE >
Electrostatic Chuck (ESC) Coulomb Type
Electrostatic Chuck (ESC) Coulomb Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.
VIEW MORE >
Electrostatic Chuck (ESC) Coulomb Type
Electrostatic Chuck (ESC) Coulomb Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.

 

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Electrostatic Chuck (ESC) J-R Type
Electrostatic Chuck (ESC) J-R Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.
VIEW MORE >
Electrostatic Chuck (ESC) J-R Type
Electrostatic Chuck (ESC) J-R Type

Four main advantages:

  • High processing consistency;
  • Strong resistance to plasma erosion;
  • High mechanical strength;
  • Customizable.
VIEW MORE >