PRODUCT

Fine Ceramic New Material Co.,Ltd. providing Coulomb type and J-R type electrostatic chucks (ESC) made of aluminum oxide and aluminum nitride; silicon carbide and aluminum oxide ceramic vacuum chunks and aluminum nitride heaters for pan-semiconductors, providing a safe supply of key components for semiconductor equipment and semiconductor chip manufacturing.

ABOUT US

ABOUT US

Home - About the company

Fine Ceramic New Material Co., Ltd. has many years of experience in HTCC research and production, focusing on the research and manufacturing of ceramic electrostatic chuck (ESC) for semiconductors, precision ceramic vacuum chuck, and aluminum nitride ceramic heater. 

The company has the production capacity to produce 2000 EA of 12 inches and 8 inches aluminum oxide and aluminum nitride electrostatic chucks per year, and 20000 EA of silicon carbide and aluminum oxide vacuum chucks with a size of more than 300 mm. lt also has a test center with ESC dedicated testing equipment, SEM, coordinate measuring machines, and profilometers.